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It's amazing that we can lithographically print/make these phase shifters smaller than the wavelength of light with equally small spacing...... what are they using to expose them, gama rays ? Well X-ray lithography will work for down to UV, until chip based X-ray.
davidgozzard.com
EDIT: Wow check this out.
An optical phased array for lasers
High-performance, optical phased arrays for electronic control of laser beams have recently been demonstrated. The optical aperture is lithographically fabricated to form a unity-fill-factor array of liquid-crystal-based optical phase shifters. The liquid-crystal phase shifters can be fabricated...
ieeexplore.ieee.org
Fast steering optical phased array: how to trick a control system
Optical phased arrays are a way to construct a really powerful laser beam, and steer it precisely without mirrors or lenses. Making an optical phased array that can steer millions of times per seco…
davidgozzard.com
EDIT: Wow check this out.
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