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Excimer gas supply

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There is gas supply system to excimer laser, and within this system there is a device, name and principle operation of which I would like to know.

It has three Inputs/Outputs named as IN, OUT and VAC

if gas enters IN port, it is transferred to VAC port, and in case if gas enters VAC port it is transferred to OUT.

This device is just a small box of approx. 3cm by 5cm; it is used for gas systems involving corrosive gases, so if corrosive gas enters VAC port - it goes to exhaust, and when it is required to change a cylinder with that gas, lines are emptied and filled with Helium through IN port.

So what is the name of this device? Thank you
 





diachi

diachi

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star said:
There is gas supply system to excimer laser, and within this system there is a device, name and principle operation of which I would like to know.

It has three Inputs/Outputs named as IN, OUT and VAC

if gas enters IN port, it is transferred to VAC port, and in case if gas enters VAC port it is transferred to OUT.

This device is just a small box of approx. 3cm by 5cm; it is used for gas systems involving corrosive gases, so if corrosive gas enters VAC port - it goes to exhaust, and when it is required to change a cylinder with that gas, lines are emptied and filled with Helium through IN port.

So what is the name of this device? Thank you
Click to expand...

It's sounds like a gas fill and vacuum valve of some sort .
 
GooeyGus

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If I had to guess I would say the "out" is to evacuate whatever gas may currently be in the laser... Probably some sort of flourine gas... And then use the vac port to pump down the laser, and then use the in valve to backfill once it's pumped down.

Take that with a grain of salt because I really have no idea, I've never worked with an excimer; but that is my best guess.
 
Event_Horizon

Event_Horizon

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That's definitely a fill / pump out valve. The VAC port goes to your laser cavity, IN goes through a valve to your gas mix, and OUT goes through a valve to a vacuum pump. You admit gas into the system by allowing gas to enter the IN valve and it goes into the laser. Opening the valve on the OUT end will pump gas out of the laser. Just don't open both the in and out valves at the same time!

I'm certain that's what your device does but it's proper name escapes me at the moment.
 
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