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Old 12-15-2009, 12:32 AM   #1
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Default Cymer XLA140 plus more

Some pics of a Cymer XLA140 dual chamber 193nm laser. Its a beast.

Also some pics of our optics units. I will get some pics of the beam alignment if I can.





Here is what we call a beam matching unit. The first and second mirror are motor driven. The first 2 motors are for ND filter wheels.




Here is where the BMU goes. This unit changes the properties of the beam for different conditions, better depth of focus or better resolution or a combination.




Lots of covers, sorry about that. The units are N2 purged.

I cant really say where this is from, but I can describe just about every unit there.
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Old 12-21-2009, 04:19 AM   #2
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Default Re: Cymer XLA140 plus more

Wooo Deep UV!
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Old 12-21-2009, 04:30 AM   #3
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Default Re: Cymer XLA140 plus more

Looks VERY expensive.
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Old 12-21-2009, 04:58 AM   #4
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Default Re: Cymer XLA140 plus more

Nice ---but will it pop ballons and light matches??(the only things that count!) J/K--looks very scary to me. thanks for the pix.
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Old 12-21-2009, 05:40 AM   #5
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Default Re: Cymer XLA140 plus more

Holy Chuck Norris, man. That beast is infinitely large!!
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Old 12-21-2009, 06:17 AM   #6
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Default Re: Cymer XLA140 plus more

I found some specs (not the exact same laser, these are for an XLX, while the laser here is an XLA 140, and I've seen several mentions of the XLA 140 and then the same numbers powers, but I am unsure, as I couldn't find them in the incredibly long patent lists) and according to the .pdf from Cymer, the XLX 200 (at a 3000Hz repition rate, and 200mJ pulse energy) produces 600W, and at 6000Hz, produces 1200W

Edit: Oh, forgot, here's the .pdf: http://www.tcz.com/pdf/XLX200.pdf

Edit2:Never mind all that ^
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Old 12-21-2009, 08:03 AM   #7
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Default Re: Cymer XLA140 plus more

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Originally Posted by hakzaw1 View Post
Nice ---but will it pop ballons and light matches??(the only things that count!) J/K--looks very scary to me. thanks for the pix.
Max is 4KHz, we do beam alignment at 20-50Hz. Same pulse power though, and it will easily go through latex gloves and clean room paper. We have also been known to 'accidently' get aluminum in the beam path.

I will be going home for a week, and by them this laser should be installed and up and running. I should be back at it on the 3rd, so once I get some pics of the beam alignment I will post them.

Since its DUV there is no real beam shot lol, but it does light up blue, so we will see what my iPhone picks up.
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Old 12-21-2009, 08:05 AM   #8
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Default Re: Cymer XLA140 plus more

Cymer: Products

I think it should be close to XLA100, I think the second digit is machine configuration from ASML, Nikon, Canon.

IIRC it is 40W 4KHz.
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Old 12-21-2009, 12:09 PM   #9
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Default Re: Cymer XLA140 plus more

40W sounds way more posible than 1.2kW lol. Anyway, it's still a huge amount of power lol

Btw, I'd be carefull with the Iphone camera, a 40W reflection can't be any good for the sensor...
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Old 12-22-2009, 09:14 PM   #10
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Default Re: Cymer XLA140 plus more

No worries. We don't have to worry much about reflections, it is not a pointer you can just be swinging the beam around with.
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