Gotcha. Figured there was something exotic going on.
Sorry for editing so majorly, I should fully think-out my posts before posting, instead of editing so much.
By "regular masks", do you mean it can't be done with contact aligners? Or can't be done with projection as well? (By projection, I mean like a stepper, non-contact, focusing, still using conventional lithography light sources).
And with the laser, are you planning on scanning the laser to form the pattern, or projecting through a mask?
The types of structures that I need to make are hard to make with masks because of the actual type of structures that I need and because of the dimensions that I need to achieve. And yeah, I am scanning it. Glad to see someone understands what I am trying to do.